![Determination of swing curve “shifts” as a function of illumination conditions: Impact on the CD uniformity - ScienceDirect Determination of swing curve “shifts” as a function of illumination conditions: Impact on the CD uniformity - ScienceDirect](https://ars.els-cdn.com/content/image/1-s2.0-S0167931705004612-gr2.jpg)
Determination of swing curve “shifts” as a function of illumination conditions: Impact on the CD uniformity - ScienceDirect
![Determination of swing curve “shifts” as a function of illumination conditions: Impact on the CD uniformity - ScienceDirect Determination of swing curve “shifts” as a function of illumination conditions: Impact on the CD uniformity - ScienceDirect](https://ars.els-cdn.com/content/image/1-s2.0-S0167931705004612-gr3.jpg)
Determination of swing curve “shifts” as a function of illumination conditions: Impact on the CD uniformity - ScienceDirect
![13: Mean relative intensity (intensity swing curve) calculated for the... | Download Scientific Diagram 13: Mean relative intensity (intensity swing curve) calculated for the... | Download Scientific Diagram](https://www.researchgate.net/publication/274064102/figure/fig22/AS:654759233089555@1533118174807/Mean-relative-intensity-intensity-swing-curve-calculated-for-the-negative-tone-resist.png)
13: Mean relative intensity (intensity swing curve) calculated for the... | Download Scientific Diagram
![Determination of swing curve “shifts” as a function of illumination conditions: Impact on the CD uniformity - ScienceDirect Determination of swing curve “shifts” as a function of illumination conditions: Impact on the CD uniformity - ScienceDirect](https://ars.els-cdn.com/content/image/1-s2.0-S0167931705004612-gr1.jpg)